I have all three of these cards. This is how I feel about them:
I have an ATi Mach64 VRAM card. The VRAM version is probably one of the best VLB cards you can get for Windows. It's fast, the drivers are pretty stable, and the output quality is nice. The DOS performance is maybe better than average. I don't know a lot about the DRAM version, but I heard it is slightly (but not a lot) faster in DOS. Obviously it's not a great Windows card since it only has 1MB and inferior RAMDAC.
I have a few S3 964 cards though I don't use them much. Two of them are Diamonds, and I don't really care much for Diamond. All 964 cards use VRAM, which usually makes them more suitable for Windows. I would say that the S3 964 is a little faster than the Mach64 VRAM. The S3 cards should have good compatibility as long as you're loading the VB extensions.
My ET4000W32P has 2MB of DRAM. I believe the 2nd meg of RAM is necessary to get a nice speedup in DOS with memory interleaving. I would say this card is about 1.5 times faster in DOS than the Mach64 and 964. As far as I know the only other VLB card that can compare with the W32P is the ARK1000. I also have one of those but have not tested it yet. The W32i should also be a good card. I'm not sure about the W32. I think the W32 had some problems. The W32p isn't a great card for Windows, but I've used a lot worse. I honestly didn't think it was that bad.
The bottom line is all 3 cards should be pretty good for DOS, but in terms of raw speed the Tseng is clearly superior.